Escáner de litografía EUV

TWINSCAN EXE:5000

Intel and ASML reported that more than one million wafers have been processed using High-NA EUV lithography. The total combines testing, research, and production on selected layers: it is an industrial learning milestone, not a direct measure of yield, cost, or commercial volume.

Brand
ASML
Model
EXE:5000
Generation
High-NA EUV, apertura numérica 0,55
Status
Available

Exact identification

Variants

VariantMPN / SKUMarketConfiguration
TWINSCAN EXE:5000EXE:5000Apertura numérica: 0,55

Documented data

Specifications

Apertura numérica
0,55
Resolución
8 nm

Connections

Technologies and standards

  • technologyLitografía ultravioleta extrema de alta apertura numérica (High-NA EUV)

Editorial context

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